Introduction to microelectronic fabrication /
Jaeger, Richard C.
Introduction to microelectronic fabrication / Richard C. Jaeger. - Reading, Mass. : Addison-Wesley Pub. Co., c1988. - xiii, 232 p. : ill. ; 24 cm. - Modular series on solid state devices ; v. 5 .
Includes bibliographical references and index.
0201146959 : $15.95
86022128
Integrated circuits--Very large scale integration--Design and construction--Textbooks.
TK7874 / .J33 1988
621.381/73
Introduction to microelectronic fabrication / Richard C. Jaeger. - Reading, Mass. : Addison-Wesley Pub. Co., c1988. - xiii, 232 p. : ill. ; 24 cm. - Modular series on solid state devices ; v. 5 .
Includes bibliographical references and index.
0201146959 : $15.95
86022128
Integrated circuits--Very large scale integration--Design and construction--Textbooks.
TK7874 / .J33 1988
621.381/73