Microsensors /

Microsensors / Richard S. Muller ... [et al.]. (Eds.) - New York: IEEE Press, 1991 - viii, 472 p. : ill. ; 29 cm

"Prepared under the sponsorship of the IEEE Electron Devices Society."

Includes bibliographical references (p. 451-461) and indexes.

0879422459

90004745


Miniature electronic equipment--Design and construction.
Detectors--Design and construction.
Microelectronics

TK 7870 / .M45 1991
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