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Silicon processing for the VLSI era /

Wolf, Stanley, 1943-

Silicon processing for the VLSI era / Stanley Wolf, Richard N. Tauber - Califonia: Lattice Press, 1995 - xxii, 722 p.: ill. ; 25 cm. - Vol. 3 .

Includes bibliographies and indexes.

ISBN: 096167253

LCCN: 86081923

Subjects--Topical Terms:
Semiconductors
Integrated circuits
Silicon.

LC Class. No.: TK 7874 / .W65 1995

Dewey Class. No.: 621.381/73

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