Transmission electron microscopy of silicon VLSI circuits and structures / R.B. Marcus and T.T. Sheng.
Material type: TextPublication details: New York : Wiley, c1983.Description: x, 217 p. : ill. ; 29 cmISBN:- 0471092517 :
- 621.381/73 19
- TK7874 .M26 1983
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"A Wiley-Interscience publication."
Includes bibliographical references and index.
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