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Transmission electron microscopy of silicon VLSI circuits and structures / R.B. Marcus and T.T. Sheng.

By: Contributor(s): Material type: TextTextPublication details: New York : Wiley, c1983.Description: x, 217 p. : ill. ; 29 cmISBN:
  • 0471092517 :
Subject(s): DDC classification:
  • 621.381/73 19
LOC classification:
  • TK7874 .M26 1983
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"A Wiley-Interscience publication."

Includes bibliographical references and index.

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