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Microelectronic materials and processes : [proceedings of the NATO Aadvanced Study Institute on Microelectronic Materials and Processes, Il Ciocco, Castelvecchio Pascoli, Italy, June 30-July 11, 1986] / edited by R. A. Levy.

By: Contributor(s): Material type: TextTextSeries: NATO ASI series. Series E, Applied sciences ; ; no. 164.Publication details: Dordrecht ; Boston : Kluwer Academic, c1989.Description: xiv, 985 p. : ill. ; 25 cmISBN:
  • 0792301471
  • 0792301544 (pbk.)
Subject(s): DDC classification:
  • 621.381/7 19
LOC classification:
  • TK7874 .N339 1986
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Holdings
Item type Current library Call number Status Date due Barcode
Books Books Informatics and Virtual Education Library Collection General Collection TK7874 .N339 1986 (Browse shelf(Opens below)) Available 165382

Includes bibliographies.

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