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Semiconductor lithography : principles, practices, and materials / Wayne M. Moreau.

By: Material type: TextTextSeries: MicrodevicesPublication details: New York : Plenum Press, c1988.Description: xx, 931 p. : ill. ; 26 cmISBN:
  • 0306421852
Subject(s): DDC classification:
  • 621.3815/2 19
LOC classification:
  • TK7871.85 .M583 1988
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Item type Current library Call number Status Date due Barcode
Books Books Informatics and Virtual Education Library Collection General Collection TK7871.85 .M583 1988 (Browse shelf(Opens below)) Available 7638

Includes bibliographies and index.

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