TY  - BOOK
AU  - Ito,Hiroshi
AU  - Tagawa,Seichi
AU  - Horie,Kazuyuki
TI  - Polymeric materials for microelectronic applications: science and technology 
SN  - 0841230552 
AV  - TK 7871.15 .P65 1994
U1  - 621.381 20
PY  - 1994///
CY  - Washington
PB  - American Chemical Society
KW  - Microelectronics
KW  - Polymers
N1  - includes index
ER  -