TY  - BOOK
AU  - Jaeger,Richard C.
TI  - Introduction to microelectronic fabrication
SN  - 0201146959 :
AV  - TK7874 .J33 1988
U1  - 621.381/73 19
PY  - 1988///
CY  - Reading, Mass.
PB  - Addison-Wesley Pub. Co.
KW  - Integrated circuits
KW  - Very large scale integration
KW  - Design and construction
KW  - Textbooks
N1  - Includes bibliographical references and index
ER  -