TY  - BOOK
AU  - 
TI  - Handbook of microlithography, micromachining, and microfabrication
SN  - 0-8194-2378-5 
AV  - TK 7836 .H36 1997
PY  - 1997///
CY  - Washington
PB  - SPIE Optical Engineering Press
KW  - Microlithography
KW  - Micromachining
KW  - Microfabrication
N1  - Includes bibliographical references and indexes
ER  -