TY - BOOK AU - O'Hanlon,John F. TI - A user's guide to vacuum technology SN - 9780471270522 AV - TJ940 .O33 2003 PY - 2003/// CY - New Jersey PB - John Wiley & Sons KW - Vacuum technology KW - Handbooks, manuals, etc N1 - Includes bibliographical references and index ER -