TY  - BOOK
AU  - Wolf, Stanley
TI  - Silicon processing for the VLSI: Process integration 
SN  - 0961672145
AV  - TK 7874 .W65  1990
PY  - 1990///
CY  - Califonia
PB  - Lattice press
KW  - Silicon Processing
KW  - Process intergration
N1  - includes index
ER  -