TY - BOOK AU - Nedelcu, Nicoleta TI - Thin films: processes and characterization techniques SN - 978-3-031-06615-3 AV - TK 7874.8 .N43 2023 PY - 2023/// CY - Switzerland PB - Springer KW - Vacuum KW - Inhomogeneities KW - Morpho-stracture N1 - Includes index ER -