TY  - BOOK
AU  - Muller,Richard S.
AU  - Howe,Roger T.
AU  - Senturia,Sephen D
AU  - Smith,Rosemary L.
AU  - White,Richard M.
ED  - IEEE Electron Devices Society.
TI  - Microsensors
SN  - 0879422459
AV  - TK 7870 .M45 1991
PY  - 1991///
CY  - New York
PB  - IEEE Press
KW  - Miniature electronic equipment
KW  - Design and construction
KW  - Detectors
KW  - Microelectronics
N1  - "Prepared under the sponsorship of the IEEE Electron Devices Society."; Includes bibliographical references (p. 451-461) and indexes
ER  -