TY  - BOOK
AU  - Wolf,Stanley
AU  - Tauber,Richard N.
TI  - Silicon processing for the VLSI era
SN  - 096167253
AV  - TK 7874 .W65 1995
U1  - 621.381/73 19
PY  - 1995///
CY  - Califonia
PB  - Lattice Press
KW  - Semiconductors
KW  - Integrated circuits
KW  - Silicon
N1  - Includes bibliographies and indexes
ER  -