TY  - BOOK
AU  - Williams,Ralph E.
TI  - Modern GaAs processing methods
SN  - 0890063435
AV  - TK7871.15.G3 W56 1990
U1  - 621.3815/2 20
PY  - 1990///
CY  - Boston
PB  - Artech House
KW  - Gallium arsenide semiconductors
N1  - Includes bibliographical references and index
ER  -