TY  - BOOK
AU  - Fung,Clifford D.
ED  - Workshop on Micromachining and Micropackaging of Transducers
TI  - Micromachining and micropackaging of transducers
SN  - 0444425608 :
AV  - TK7872.T6 M53 1985
U1  - 621.3 19
PY  - 1985///
CY  - Amsterdam, New York, New York, N.Y.
PB  - Elsevier, [Distributor] for the U.S.A. and Canada, Elsevier Science Pub. Co.
KW  - Transducers
KW  - Design and construction
KW  - Congresses
KW  - Micromachining
N1  - Papers from the Workshop on Micromachining and Micropackaging of Transducers, organized by the faculty associated with the Semiconductor Chemical Transducer Resource at Case Western Reserve University, on Nov. 7-9, 1984; Includes bibliographies
ER  -