Particle control for semiconductor manufacturing / [edited by] R.P. Donovan.
Material type: TextPublication details: New York : M. Dekker, c1990.Description: xiii, 464 p. : ill. ; 26 cmISBN:- 0824782429 (alk. paper)
- 621.381/52 20
- TK7871.85 .P358 1990
Item type | Current library | Call number | Status | Date due | Barcode | |
---|---|---|---|---|---|---|
Books | Informatics and Virtual Education Library Collection General Collection | TK7871.85 .P358 1990 (Browse shelf(Opens below)) | Available | 4291 |
Updated revision of the course notes distributed at a short course held on Apr. 19-21, 1988, in Research Triangle Park, N.C.
Includes bibliographical references.
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