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1.
Semiconductor lithography : principles, practices, and materials / Wayne M. Moreau. by Series: Microdevices
Material type: Text Text; Format: print ; Literary form: Not fiction
Publication details: New York : Plenum Press, c1988
Availability: Items available for loan: Informatics and Virtual Education Library Collection (1)Call number: TK7871.85 .M583 1988.

2.
Semiconductor physical electronics / Sheng S. Li. by Series: Microdevices
Material type: Text Text; Format: print ; Literary form: Not fiction
Publication details: New York : Plenum, c1993
Availability: Items available for loan: Informatics and Virtual Education Library Collection (1)Call number: TK7871.85 .L495 1993.

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