| 000 | 00672cam a2200193 a 4500 | ||
|---|---|---|---|
| 008 | 961204m19971997waua b 001 0 eng | ||
| 010 | _a 96040237 | ||
| 020 | _a0-8194-2378-5 | ||
| 050 | 0 | 0 |
_aTK 7836 _b.H36 1997 |
| 245 | 0 | 0 |
_aHandbook of microlithography, micromachining, and microfabrication/ _cP. Rai-Choudhury, [Ed.] |
| 260 |
_bSPIE Optical Engineering Press ; _aWashington, _c1997 |
||
| 300 |
_aviii, 767 p.: _bill.; _c26 cm |
||
| 504 | _aIncludes bibliographical references and indexes | ||
| 650 | 0 |
_aMicrolithography _914686 |
|
| 650 | 0 |
_aMicromachining _915508 |
|
| 650 | 0 |
_aMicrofabrication. _932706 |
|
| 700 | 2 |
_aRai-Choudhury, P. _932707 |
|
| 942 |
_2lcc _cBK |
||
| 999 |
_c14291 _d14291 |
||