000 00556nam a22001817a 4500
008 240801b |||||||| |||| 00| 0 eng d
020 _a0961672145
050 _aTK 7874
_b.W65 1990
100 _aWolf, Stanley
_9110855
245 _aSilicon processing for the VLSI:
_bProcess integration /
_cstanley Wolf
260 _aCalifonia:
_bLattice press,
_c1990
300 _axxxi, 753 p.:
_bill. ;
_c25 cm.
440 _vVol. 2
521 _aincludes index
650 _aSilicon Processing
_9110856
650 _aProcess intergration
_9110857
942 _2lcc
_cBK
999 _c39182
_d39182