000 | 00633nam a22002177a 4500 | ||
---|---|---|---|
003 | OSt | ||
005 | 20241205070751.0 | ||
008 | 241205b |||||||| |||| 00| 0 eng d | ||
020 | _a978-3-031-06615-3 | ||
040 | _cDLC | ||
050 |
_aTK 7874.8 _b.N43 2023 |
||
100 |
_aNedelcu, Nicoleta _9113673 |
||
245 |
_aThin films : _bprocesses and characterization techniques / _cNicoleta Nedelcu |
||
260 |
_aSwitzerland : _bSpringer, _c2023 |
||
300 |
_ax, 124p. : _bill. ; _c24cm |
||
504 | _aIncludes index | ||
650 |
_aVacuum _9113674 |
||
650 |
_aInhomogeneities _9113675 |
||
650 |
_aMorpho-stracture _9113676 |
||
942 |
_2lcc _cBK |
||
999 |
_c39854 _d39854 |