000 00633nam a22002177a 4500
003 OSt
005 20241205070751.0
008 241205b |||||||| |||| 00| 0 eng d
020 _a978-3-031-06615-3
040 _cDLC
050 _aTK 7874.8
_b.N43 2023
100 _aNedelcu, Nicoleta
_9113673
245 _aThin films :
_bprocesses and characterization techniques /
_cNicoleta Nedelcu
260 _aSwitzerland :
_bSpringer,
_c2023
300 _ax, 124p. :
_bill. ;
_c24cm
504 _aIncludes index
650 _aVacuum
_9113674
650 _aInhomogeneities
_9113675
650 _aMorpho-stracture
_9113676
942 _2lcc
_cBK
999 _c39854
_d39854