000 01034pam a2200289 a 4500
001 1051538
005 20240805073638.0
008 900509s1991 nyua b 000 0 eng
010 _a 90004745
020 _a0879422459
050 0 0 _aTK 7870
_b.M45 1991
245 0 0 _aMicrosensors /
_cRichard S. Muller ... [et al.]. (Eds.)
260 _aNew York:
_bIEEE Press,
_c1991
300 _aviii, 472 p. :
_bill. ;
_c29 cm
500 _a"Prepared under the sponsorship of the IEEE Electron Devices Society."
504 _aIncludes bibliographical references (p. 451-461) and indexes.
650 0 _aMiniature electronic equipment
_xDesign and construction.
_94978
650 0 _aDetectors
_xDesign and construction.
_94979
650 0 _aMicroelectronics
_94980
700 1 _aMuller, Richard S.
_94981
700 1 _aHowe, Roger T.
_9111058
700 1 _aSenturia, Sephen D
_9111059
700 1 _aSmith, Rosemary L.
_9111060
700 1 _aWhite, Richard M.
_9111061
710 2 _aIEEE Electron Devices Society.
_94982
942 _2lcc
_cBK
999 _c4969
_d4969