000			01364cam a2200277 a 4500
001			4278510
005			20150702102902.0
008			850910s1985 ne a b 100 0 eng
010			_a 85020713
020			_a0444425608 : _cfl 170.00 (est.)
040			_aDLC _cDLC _dDLC
050	0	0	_aTK7872.T6 _bM53 1985
082	0	0	_a621.3 _219
245	0	0	_aMicromachining and micropackaging of transducers / _c[edited by] Clifford D. Fung ... [et al.].
260			_aAmsterdam ; _aNew York : _bElsevier ; _aNew York, N.Y. : _b[Distributor] for the U.S.A. and Canada : _bElsevier Science Pub. Co., _c1985.
300			_aviii, 244 p. : _bill. ; _c25 cm.
440		0	_aStudies in electrical and electronic engineering ; _v20 _98035
500			_aPapers from the Workshop on Micromachining and Micropackaging of Transducers, organized by the faculty associated with the Semiconductor Chemical Transducer Resource at Case Western Reserve University, on Nov. 7-9, 1984.
504			_aIncludes bibliographies.
650		0	_aTransducers _xDesign and construction _xCongresses. _915507
650		0	_aMicromachining _xCongresses. _915508
700	1		_aFung, Clifford D. _d1947- _915509
711	2		_aWorkshop on Micromachining and Micropackaging of Transducers _d(1984 : _cCase Western Reserve University) _915510
906			_a7 _bcbc _corignew _d1 _eocip _f19 _gy-gencatlg
942			_2lcc _cBK
999			_c8260 _d8260