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Handbook of microlithography, micromachining, and microfabrication/

Handbook of microlithography, micromachining, and microfabrication/ P. Rai-Choudhury, [Ed.] - Washington, SPIE Optical Engineering Press ; 1997 - viii, 767 p.: ill.; 26 cm

Includes bibliographical references and indexes

ISBN: 0-8194-2378-5

LCCN: 96040237

Subjects--Topical Terms:
Microlithography
Micromachining
Microfabrication.

LC Class. No.: TK 7836 / .H36 1997

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