Handbook of microlithography, micromachining, and microfabrication/ (Record no. 14291)
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| 000 -LEADER | |
|---|---|
| fixed length control field | 00672cam a2200193 a 4500 |
| 008 - FIXED-LENGTH DATA ELEMENTS--GENERAL INFORMATION | |
| fixed length control field | 961204m19971997waua b 001 0 eng |
| 010 ## - LIBRARY OF CONGRESS CONTROL NUMBER | |
| LC control number | 96040237 |
| 020 ## - INTERNATIONAL STANDARD BOOK NUMBER | |
| International Standard Book Number | 0-8194-2378-5 |
| 050 00 - LIBRARY OF CONGRESS CALL NUMBER | |
| Classification number | TK 7836 |
| Item number | .H36 1997 |
| 245 00 - TITLE STATEMENT | |
| Title | Handbook of microlithography, micromachining, and microfabrication/ |
| Statement of responsibility, etc | P. Rai-Choudhury, [Ed.] |
| 260 ## - PUBLICATION, DISTRIBUTION, ETC. (IMPRINT) | |
| Name of publisher, distributor, etc | SPIE Optical Engineering Press ; |
| Place of publication, distribution, etc | Washington, |
| Date of publication, distribution, etc | 1997 |
| 300 ## - PHYSICAL DESCRIPTION | |
| Extent | viii, 767 p.: |
| Other physical details | ill.; |
| Dimensions | 26 cm |
| 504 ## - BIBLIOGRAPHY, ETC. NOTE | |
| Bibliography, etc | Includes bibliographical references and indexes |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name as entry element | Microlithography |
| 9 (RLIN) | 14686 |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name as entry element | Micromachining |
| 9 (RLIN) | 15508 |
| 650 #0 - SUBJECT ADDED ENTRY--TOPICAL TERM | |
| Topical term or geographic name as entry element | Microfabrication. |
| 9 (RLIN) | 32706 |
| 700 2# - ADDED ENTRY--PERSONAL NAME | |
| Personal name | Rai-Choudhury, P. |
| 9 (RLIN) | 32707 |
| 942 ## - ADDED ENTRY ELEMENTS (KOHA) | |
| Source of classification or shelving scheme | Library of Congress Classification |
| Item type | Books |
| Withdrawn status | Lost status | Source of classification or shelving scheme | Damaged status | Not for loan | Collection code | Home library | Current library | Shelving location | Date acquired | Source of acquisition | Total Checkouts | Full call number | Barcode | Date last seen | Copy number | Price effective from | Koha item type |
|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|---|
| Library of Congress Classification | Non-fiction | Informatics and Virtual Education Library Collection | Informatics and Virtual Education Library Collection | General Collection | 20/08/2015 | Donation | TK7 836 .H36 1997 | 166429 | 20/08/2015 | C.1 | Books | ||||||
| Library of Congress Classification | Non-fiction | Informatics and Virtual Education Library Collection | Informatics and Virtual Education Library Collection | General Collection | 02/08/2024 | Donation | TK 7836 .H36 1997 | 310 | 02/08/2024 | C.2 | Books |