Handbook of microlithography, micromachining, and microfabrication/ P. Rai-Choudhury, [Ed.]

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Material type: Text

TextPublication details: SPIE Optical Engineering Press ; Washington, 1997Description: viii, 767 p.: ill.; 26 cmISBN:

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Holdings
Item type	Current library	Collection	Call number	Copy number	Status	Date due	Barcode
Books	Informatics and Virtual Education Library Collection General Collection	Non-fiction	TK7 836 .H36 1997 (Browse shelf(Opens below))	C.1	Available		166429
Books	Informatics and Virtual Education Library Collection General Collection	Non-fiction	TK 7836 .H36 1997 (Browse shelf(Opens below))	C.2	Available		310

Includes bibliographical references and indexes

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