Handbook of microlithography, micromachining, and microfabrication/ P. Rai-Choudhury, [Ed.]
Material type: TextPublication details: SPIE Optical Engineering Press ; Washington, 1997Description: viii, 767 p.: ill.; 26 cmISBN:- 0-8194-2378-5
- TK 7836 .H36 1997
Item type | Current library | Collection | Call number | Copy number | Status | Date due | Barcode | |
---|---|---|---|---|---|---|---|---|
Books | Informatics and Virtual Education Library Collection General Collection | Non-fiction | TK7 836 .H36 1997 (Browse shelf(Opens below)) | C.1 | Available | 166429 | ||
Books | Informatics and Virtual Education Library Collection General Collection | Non-fiction | TK 7836 .H36 1997 (Browse shelf(Opens below)) | C.2 | Available | 310 |
Includes bibliographical references and indexes
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